Sweeping the tilt angle can boost film thickness uniformity and sidewall protection when also keeping away from higher Electricity-reflected neutral species for critical processes.
In-situ optical checking and Regulate is available as a result of Angstrom’s optical checking & Management deal.
An optional cryogenic pump improves base stress and pumping velocity and will be isolated from the chamber for the duration of reactive processes with oxygen.
The dimensions, position, and kit ratio of each Earth are optimized to offer the very best probable film thickness uniformity.
We use cookies to make sure you contain the smoothest experience navigating our website. This includes gathering non-Individually identifiable info through your searching session, like: which webpages you browse, what products you assessment And exactly how you communicate with Angstrom.
If it’s off by even 50 percent a diploma, it will eventually have an effect on the morphology of these nanostructures noticeably.
Angstrom went to good lengths to refine the tolerances of the lean angle, enhancing it from a variation of around an entire diploma on non-Angstrom methods I’ve accustomed to a lot less than 0.
Our special style and design allows for direct or oblique monitoring in the variable angle phase, getting rid of the necessity for tooling components or possibly a witness glass changer. Find out more concerning the Optical Monitoring & Regulate package deal here.
Together with sample rotation, the variable angle phase that is definitely utilized for Reticle® presents for in-developed angular motion in the deposition flux.
All conventional Reticle® platforms include an extra gridless close-Hall ion resource with hollow cathode neutralizer.
1 degree. Those beautifully narrow tolerances allow for us to regularly build incredibly precise nanostructures. I can say wholeheartedly the solution and service Angstrom Engineering® sent has become incredible.
Self-aligned Zirconium and niobium supply ion optics are configured especially for the desired deposition necessities and geometry of your respective approach.
Angstrom Engineering’s Reticle® devices offer a switch-essential Resolution for all those aiming to notice any optical structure into a significant-performance movie.
Dynamic uniformity shaping is realized using a flux correction protect between the deposition resource as well as substrate.
Every single axis of movement is controlled by means of Aeres® utilizing precision servo motors, delivering better than 0.1 degrees of positional precision. Entrance side infrared heating bulbs tilt Along with the phase to offer a reliable temperature profile for reactive processes.